The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2000
Filed:
Mar. 14, 1996
Matthias Wagner, Jena, DE;
Hans-Dieter Geiler, Jena, DE;
Leica Microsystems Wetzlar GmbH, Wetzlar, DE;
Abstract
The invention is directed to a method and an arrangement for the response analysis of semiconductor materials with optical excitation. The object of the invention, to find a new type of response analysis of semiconductor materials with optical excitation which also allows a sufficiently precise detection of the charge carrier wave with a higher excitation output and a shorter charge carrier lifetime, is met according to the invention in that an exciting laser beam is intensity-modulated with two discrete modulation frequencies (.OMEGA..sub.1 ; .OMEGA..sub.2), the luminescent light exiting from the object is measured on the difference frequency (.OMEGA..sub.1 -.OMEGA..sub.2), and the luminescent light is analyzed as a function of the arithmetic mean (.OMEGA.) of the modulation frequencies (.OMEGA..sub.1 ; .OMEGA..sub.2). The invention is applied in the semiconductor industry for determining different electrical parameters of semiconductor materials.