The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2000
Filed:
Dec. 22, 1998
Masao Yoshida, Kokubu, JP;
Suehiro Imaizumi, Kokubu, JP;
Kyocera Corporation, Kyoto, JP;
Abstract
In order to achieve concentric distribution of temperatures over a wafer supporting surface and improve the uniformity of heating, a heating resistor 4 having a configuration for providing a predetermined heater pattern buried in a ceramic substrate 2 constituting a wafer heating apparatus is made from arc portions 4a-4g which have different radii and are arranged to form concentric circles disposed at substantially the same intervals and straight portions 4h-4m which connect those of the arc portions 4a-4g that are adjacent to each other in the radial direction thereby to form a series circuit, while the arc portions 4a-4g and the straight portions 4h-4m are made in substantially the same strip width and the distance L1 between a pair of straight portions among the straight portions 4h-4m which are located on the same circle is made less than the distance L2 between the arc portions which are adjacent to each other in the radial direction.