The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2000
Filed:
Jun. 25, 1998
Naoki Nagashima, Tokyo, JP;
Sony Corporation, Tokyo, JP;
Abstract
Disclosed is a method of fabricating a semiconductor device, including the steps of: preparing a silicon substrate on which a gate insulating film and a gate electrode composed of a polycrystalline silicon film and an insulating film are sequentially formed; forming side walls from a material having an etching selectivity to the insulating film on both sides of the gate electrode; forming a resist film on the silicon substrate so as to cover the gate electrode, and etching-back the resist film until the resist film remains on the silicon substrate except for the gate electrode to expose an upper portion of the gate electrode; selectively removing the insulating film on the gate electrode using the resist film and the side walls as a mask, and removing the resist film; and forming a refractory metal film on the silicon substrate so as to cover the gate electrode, and forming metal silicide films on the gate electrode and the silicon substrate by silicidizing, through heat-treatment, the refractory metal film with the polycrystalline silicon film of the gate electrode and with the silicon substrate.