The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2000
Filed:
Apr. 06, 1998
Applicant:
Inventors:
Assignee:
Nippon Shokubai Co., Ltd., Osaka, JP;
Primary Examiner:
Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
117105 ; 117109 ; 117915 ;
Abstract
Crystal of sublimable material is recovered by introducing a reaction gas containing sublimable material into a vertical recovery chamber kept at a temperature near a depositing temperature of the sublimable material to form a crystal deposit of the sublimable material on a surface of a wall of the chamber, and cooling the wall formed with the crystal deposit to a temperature below the previous temperature to cause a contraction difference between the crystal deposit and the wall formed with the crystal deposit, and break away the deposited crystal from the wall.