The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2000
Filed:
Nov. 17, 1998
Tod F Schiff, Portland, OR (US);
Schmitt Measurement Systems, Inc., Portland, OR (US);
Abstract
A system and method for characterizing a surface are disclosed. The system includes a light source and source optics which direct a beam of light toward the surface. A first optical integrating device is positioned and configured to receive a first portion of the scattered light and a second optical integrating device is positioned and configured to receive a second portion of the scattered light. The second optical integrating device reflects the second portion of the scattered light through a segmenting optic. The segmenting optic is configured to segment the second portion of the scattered light to thereby isolate the anisotropic roughness amplitude to one or more segments. A roughness ratio indicative of the anisotropic roughness is produced by comparing the roughness amplitudes of the segments.