The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2000
Filed:
Dec. 16, 1997
Applicant:
Inventor:
Jorg Hehmann, Nurnberg, DE;
Assignee:
Alcatel, Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; G01B / ;
U.S. Cl.
CPC ...
216 59 ; 216 84 ; 356373 ; 356375 ;
Abstract
A method is disclosed for checking the accuracy of the result of a multistep etching process for forming depressions in a substrate. The check is made possible in a simple manner by providing line patterns on the etch masks. The line patterns on the etch masks for different etching steps are different and form a vernier system.