The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2000
Filed:
Jun. 26, 1998
Applicant:
Inventor:
Michael G Ressl, Western Springs, IL (US);
Assignee:
Lucent Technologies, Inc., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
385 14 ;
Abstract
An optical monitoring system for III-V integrated circuit wafers utilizes an optical transmitter/receiver assembly formed in the wafer at an early stage in the fabrication process. The optical transmitter is then activated and the optical output signal is monitored during subsequent processing steps, such as ion implantation and layer deposition to assess the quality of the process. In one embodiment, the monitoring system is useful as an endpoint detection process.