The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2000
Filed:
Aug. 28, 1998
Applicant:
Inventors:
Gordon S Kino, Stanford, CA (US);
Pavel Neuzil, Singapore, SG;
Assignee:
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
359224 ; 359223 ;
Abstract
A silicon nitride scanning torsion mirror supported within a layer of silicon nitride by integral silicon nitride hinges. The layer is supported by a substrate which has a well beneath said mirror. A method of forming a silicon nitride scanning torsion mirror which includes depositing a silicon nitride layer on a support substrate etching the silicon nitride layer to form a mirror supported within the layer by integral torsion hinges and then selectively etching the substrate under the mirror to form a well.