The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 13, 2000

Filed:

Sep. 08, 1998
Applicant:
Inventors:

Ikuo Futamura, Komaki, JP;

Manabu Okuda, Komaki, JP;

Susumu Shibata, Komaki, JP;

Assignees:

CKD Corporation, Komaki, JP;

Kabushiki Kaisha Nextar, Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356376 ; 382286 ; 25055922 ;
Abstract

A shape measuring device includes a light source for generating slit light beam and a polygon mirror for scanning the light beam and illuminating an object to be measured. The device further includes space-coding light beam controlling means, phase-shifting light beam controlling means, and a CCD camera which picks up an optical image of an object to be measured obtained by illumination of the light beam. The space-coding light beam controlling means controls light beam whose distribution of integrated illumination has a stripe patter in accordance with a predetermined code and the phase-shifting light beam controlling means controls light beam whose distribution of integrated illumination has a sine-wave like pattern. The distribution of integrated illumination intensity is possessed by the light beam illuminating within a time period for picking up one frame. With the picked up image information, space-coding shape operating means calculates a rough shape of the object to be measured, phase-shifting shape operating means calculates a precise shape of the object be measured, and then shape combining/operating means combines and calculates the shape of the object to be measured. Because the device combines a rough shape measured with wide range and a precise shape measured with high resolving power, the device can measure shape with wide dynamic range and with high resolution power.


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