The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2000

Filed:

Dec. 19, 1995
Applicant:
Inventor:

Yoshiro Tomikawa, Yonezawa, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
31032302 ; 310317 ; 310358 ; 31032316 ;
Abstract

A vibration actuator has an elastic member formed into a ring shape, an electro-mechanical converting element joined to the elastic member, and a relative moving member which is in press contact with the elastic member. In the vibration actuator, the electro-mechanical converting element generates, upon application of a driving signal, a first vibration mode that vibrates in a direction parallel to a reference plane where the ring shape is formed, and a second vibration mode that vibrates in a direction perpendicular to or substantially perpendicular to the reference plane, and the relative moving member moves relative to the elastic member in one- or two-dimensional directions in the reference plane by the first and second vibration modes.


Find Patent Forward Citations

Loading…