The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2000
Filed:
Nov. 30, 1998
Toshiyuki Ohta, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
Calculation is made of a collision point and a collision time of collision between a sputter particle and a surrounding gas particle (step 102). The collision time is compared with a unit time having a predetermined length (step 104). When the collision time is smaller than the unit time, calculation is made of the temperature distribution of a surrounding gas at the collision point with reference to a result of thermal analysis performed in a preceding unit time (step 105). Then, the energy variation of the surrounding gas particle is calculated by the use of the temperature distribution (steps 106-109). After the calculation is performed for all collision coordinates within the unit time, the temperature distribution of the surrounding gas at the collision point. is obtained by thermal analysis with reference to the result of calculation of the energy variation and the unit time is renewed (steps 111-113).