The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2000
Filed:
Sep. 05, 1997
Applicant:
Inventors:
Daniel Nicolos Koury, Jr, Mesa, AZ (US);
Ronald James Gutteridge, Paradise Valley, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P / ;
U.S. Cl.
CPC ...
7351432 ; 73-138 ; 73862626 ;
Abstract
A sensing structure (10) formed overlying a substrate (50), for example a semiconductor substrate, has a movable mass (12) substantially split into two halves with a self-test structure disposed between the two halves. The self-test structure has a plurality of single-capacitor actuators for displacing the movable mass. Each actuator is formed by a movable finger (18) connected to the movable mass and a fixed finger (44) mounted by an anchor to the substrate. Each actuator is shielded by a fixed shield finger (42) so that all actuators force the movable mass in a common direction.