The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2000
Filed:
Aug. 27, 1998
Applicant:
Inventors:
Bausan Yuan, San Jose, CA (US);
Ting-Chien Teng, Fremont, CA (US);
Assignee:
Nikon Corporation, , JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02K / ;
U.S. Cl.
CPC ...
310 12 ;
Abstract
A fine stage control system for use for instance in a semiconductor lithography machine, uses a pair of opposing (push-pull) E/I core actuators to move the stage with high precision along an axis. The paired actuators are coupled together mathematically in terms of their control characteristics and controlled as a single entity, thereby providing a more efficient control scheme and improved system performance.