The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 2000
Filed:
Nov. 02, 1998
Gi-Tae Jeong, Kyunggi-do, KR;
Abstract
Conductive lines are fabricated in integrated circuits by forming a groove in an insulating layer in the integrated circuit, wherein the groove has a sidewall, a base, and an upper surface. An insulating spacer is formed on the sidewall of the groove. The insulating spacer has a sloped contour from the sidewall to the base of the groove, defining a region at the base of the groove that is free of the insulating spacer. A conductive material is formed in the groove extending from the base of the groove to beneath the upper surface of the groove. The sloped contour of the spacer may provide for improved capping of conductive lines by allowing an increase in the amount of conductive material removed by a back-etching process, thereby reducing the likelihood of an electrical short between conductive lines.