The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2000

Filed:

Apr. 10, 1998
Applicant:
Inventors:

Uwe Schulz, Iroisdorf, DE;

Claus-Jurgen Kroder, St. Augustin, DE;

Jorg Brien, Wuppertal, DE;

Hartmut Schurmann, Neunkirchen, DE;

Klaus Fritscher, Koln, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ;
U.S. Cl.
CPC ...
4271263 ; 427566 ; 4272555 ;
Abstract

The present invention relates to a process for vapor-depositing zirconium dioxide on ceramic or metallic substrates, and the heat-insulating layers obtainable by such process. In particular, the invention relates to a process for vapor-depositing zirconium dioxide, optionally doped with rare-earth metal oxides or mixtures of such oxides, on ceramic or metallic substrates in a range of substrate temperatures of from 600 to 1550.degree. C. while the substrate is continuously rotated at a speed in the range of from 1 to 300 rpm, characterized in that, following the nucleation phase, the rotational speed and the temperature are adjusted to a range defined by the equations: ##EQU1## where T represents the substrate temperature in .degree. K, and .omega. represents the rotational speed of the substrate in rpm, wherein the rotational speed is varied continuously or discontinuously, or alternatively in alternating senses of rotation.


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