The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2000
Filed:
Aug. 28, 1998
Hae Gwon Lee, Chungcheongnam-do, KR;
Gyu Hwan Sim, Daejon, KR;
Sung Woo Choi, Daejeon, KR;
Mun Cheol Baek, Daejeon, KR;
Kee Soo Nam, Daejeon, KR;
Electronics and Telecmmunications Research Institute, Daejeon-shi, KR;
Abstract
An effusion cell assembly for epitaxial apparatus is disclosed. The assembly includes an effusion cell incluing a growing material, a heater for supplying heats with the effusion cell to effuse the growing material, a supporting plate for supporting the heater, a bolt having one end connected to the supporting plate, a cell flange coupled to a lower flange of an adaptor for supporting the cell assembly, bellows fixed between the supporting plate and the cell flange including the bolt, and a control nut for expanding and contracting the bellows so as to separate only the cell assembly from a vacuum chamber with entire vacuum maintained in the vacuum chamber and local vacuum released in the cell assembly. The epitaxial apparatus further includes a control valve located between an entrance flange of the vacuum chamber and an upper adaptor flange of the adaptor for introducing and maintaining vacuum in the vacuum chamber.