The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2000
Filed:
Dec. 31, 1997
Applicant:
Inventors:
Roger L Verkuil, Wappinger Falls, NY (US);
Gregory S Horner, Santa Clara, CA (US);
Tom G Miller, Solon, OH (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01T / ;
U.S. Cl.
CPC ...
250326 ; 250324 ; 361224 ;
Abstract
A conductive slit screen is placed between a corona gun and the surface of a semiconductor wafer. The charge deposited on the wafer by the gun is controlled by a potential applied to the screen. A chuck orients the wafer in close proximity to the screen. A desired charge is applied to the wafer by depositing alternating polarity corona charge until the potential of the wafer equals the potential of the screen.
Verkuil, Roger. (2000). Apparatus and method for depositing uniform charge on a thin oxide (U.S. Patent No. 6060709). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6060709
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile