The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2000
Filed:
Nov. 05, 1997
Norito Fujihara, Nara, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
A primary electron beam applied to a thinned sample excites Auger electrons on a surface of the thinned sample, and most of the primary electron beam is transmitted by the thinned sample, scattering and reflection are restrained and an Auger electron generation area is micrified. A primary electron beam transmitted by the thinned sample passes through a hole and is directed to a Faraday cup disposed immediately below the sample. The primary electron beam entering the Faraday cup is scattered and reflected within the Faraday cup and effectively absorbed and captured by the Faraday cup. By maintaining the potential of the Faraday cup at a ground potential during the analysis, stable data are obtained.