The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2000
Filed:
Oct. 29, 1997
Hiroyuki Akatsu, Yorktown Heights, NY (US);
Russell H Arndt, Wappingers Falls, NY (US);
Bradley P Jones, Wappingers Falls, NY (US);
George F Ouimet, Millbrook, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An integrated circuit (IC) conductor and the process of making the conductor. The conductor may be a monofilament conductor, a clad conductor or a coaxial conductor. A trench is formed in a dielectric layer. An outer material layer is deposited on the dielectric layer and in the trench, thick enough that the outer material layer merges together in a seam over the trench forming a void under the seam. The outer material layer is dielectric for the monofilament conductor, a cladding material for the clad conductor and conducting material for the coaxial conductor. The void is filled with a conductor for a monofilament or clad conductors. An inner dielectric liner layer is formed on the walls of the void and a core conductor is formed on the liner layer for the coaxial conductor.