Actuated mirror array and method for the fabricating thereof

Abstract

Fabrication and mounting of an array of M.times.N mirrors on an array of M.times.N electrodisplacive actuators is carried out by one of the two inventive methods, comprising the steps of: patterning a substrate into an array of M.times.N protrusions; forming subsequently a separation layer, a first, a second and a third metallic layers on a top of the array of M.times.N protrusions; bonding the array of M.times.N actuators on the protrusions; disengaging the array of M.times.N protrusions from an array of M.times.N mirror bodies by removing the separation layer; and forming a fourth metallic layer on the first metallic layer so as to provide the reflector to thereby provide the array of M.times.N actuated mirrors. The other method comprises the steps of: clamping physically a thin glass on a top surface of a substrate; plating a top surface of the thin glass with a bonding layer; bonding the array of M.times.N actuators on a top surface of the bonding layer and removing a portions of the bonding layer which is not connected with a top surface of the array of M.times.N actuators; forming a metallic layer on the thin glass; patterning the metallic layer into the array of M.times.N mirrors; cutting a portion of the thin glass which is not contacted with the array of M.times.N mirror to thereby provide the array of M.times.N actuated mirror.