The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2000
Filed:
Aug. 19, 1998
Masashi Fujii, Ayase, JP;
Yoshinobu Terui, Ayase, JP;
Speedfam Clean System Co., Ltd., Ayase, JP;
Abstract
A straightening unit 13 including a first straightening vane 21 having a higher penetration resistance and a second straightening vane 22 having a lower penetration resistance is mounted in a box-shaped casing 12 in which only the end surface of said casing is open as an orifice for a washing liquid, thereby forming a sealed liquid-supply chamber 27 behind the straightening unit 13. When the washing liquid from the liquid-supply chamber 27 is passed through the straightening unit 13 under pressure, the first straightening vane 21 provides a uniform flow velocity regardless of the liquid depth, and the second straightening vane 22 alleviates turbulent flow of the washing liquid 5 to make it as uniform as possible.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile