The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2000
Filed:
Sep. 04, 1998
Applicant:
Inventors:
Robert A Ross, Charlottesville, VA (US);
Stephen H Jones, Afton, VA (US);
Assignee:
Virginia Semiconductor, Inc., Fredericksburg, VA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356381 ; 356357 ;
Abstract
Techniques and systems for obtaining the thickness map of a partially transparent substrate in a nondestructive optical fashion. The thickness is determined by comparing the amount of absorption by the substrate to a calibrated amount obtained from a substrate standard with a known thickness that is formed of the same material. Digital signal processing operations are performed to reduce noise and to improve resolution of the thickness map.