The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2000

Filed:

Jun. 18, 1997
Applicant:
Inventor:

Kazuo Konuma, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ; H01J / ;
U.S. Cl.
CPC ...
313495 ; 313309 ; 313336 ; 313351 ; 313238 ;
Abstract

A field emission device is provided, which is able to prevent the inclination of emission direction of electrons. An insulating layer is formed on a first main surface of a substrate. A conductive layer with a gate electrode part and an interconnection part is selectively formed on the insulating layer. A second conductive layer is formed on the second main surface of the substrate. The first part has a window to expose the insulating layer. The insulating layer has a hole to expose the first main surface of the substrate. The hole is located just below the window of the conductive layer. A conical cathode is formed on the exposed first main surface of the substrate in the bole. The central axis of the cathode, which penetrates the tip of the cathode, is tilted with respect to a normal of the second conductive layer toward an opposite side to the interconnection part of the conductive layer. The direction of the emitted electrons is approximately parallel to the normal of the second conductive layer.


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