The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2000
Filed:
Sep. 03, 1996
Shigeru Hayata, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An illumination system includes a fly's eye lens including lens elements each having an approximately oblong shape in section perpendicular to an optical axis of the illumination system, and an optical system for separating light from a light source into plural lights and for directing the plural lights toward the fly's eye lens along different directions. The optical system is arranged so that paths of the plural lights are juxtaposed along a lengthwise direction of the oblong shapes. A device manufacturing method includes transferring a device pattern of a mask onto a workpiece using such an illumination system.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile