The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2000
Filed:
Mar. 29, 1999
Applicant:
Inventor:
Lawrence R Moschini, Carlisle, MA (US);
Assignee:
Brooks Automation, Inc., Chelmsford, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B / ;
U.S. Cl.
CPC ...
219494 ; 219483 ; 21912143 ; 438660 ; 438663 ; 118725 ;
Abstract
A substrate heating apparatus having a chamber, a device for adding gas into the chamber and a substrate heater is provided. The substrate heater is located within the chamber and includes a first plate having a bottom surface. The bottom surface of the first plate has at least one groove. The at least one groove forms at least two thermal zones on the first plate. The substrate heater further includes a heater element and a second plate. The heater element is located between the bottom surface of the first plate and the second plate and thus enables heating of the substrate by radiation and gas conduction.