The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2000
Filed:
Oct. 13, 1998
Yoshinobu Terui, Ayase, JP;
Speedfam Clean Systems Co., Ltd., Ayase, JP;
Abstract
A plurality of washing sections 6, 7, and 8 for individually washing different portions of a cassette body 111 in a washing liquid 3 using washing brushes 10, 14, and 20, respectively, are sequentially formed in a groove-shaped washing vessel 2 through which the washing liquid 3 flows continuously. A plurality of transfer means 26, 27, and 28 for chucking the cassette body 111 being washed to bring it into contact with the washing brushes 10, 14, and 20, respectively, and for transferring the cassette body 111 that has been washed to the washing section upstream are provided so as to correspond to the washing sections 6, 7, and 8, respectively.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile