The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2000
Filed:
Jul. 10, 1998
Applicant:
Inventor:
Webster C Cash, Jr, Boulder, CO (US);
Assignee:
Focused X-Rays, Boulder, CO (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K / ;
U.S. Cl.
CPC ...
378 85 ; 378 34 ; 378 84 ; 378147 ;
Abstract
An x-ray collimator for use primarily in x-ray lithography for semiconductor fabrication provides a multi-channel collimator to produce a series of collimated beams from an x-ray source. Each channel in the array gathers photons from a small solid angle of the x-ray source and employs at least two pairs of orthogonal spherical mirrors in grazing incidence to produce a collimated beam. An array of flat mirrors steer the collimated beams into a slightly converging geometry. A beam assembler then combines the beams to create a single, large collimated beam that can be used to expose the die.