The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2000
Filed:
Nov. 13, 1998
Applicant:
Inventor:
Chi-Hung Wei, Hsinchu, TW;
Assignee:
United Integrated Circuits Corp., Hsinchu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356356 ; 356363 ; 2502 / ; 2505593 ;
Abstract
An improved aligner detector is provided. The improved aligner detector includes, a detector, several electrooptic modulators, and a refractor set, which includes several wedge patterns. Each of the electrooptic modulators includes a double-refraction transistor, which has a property of double refraction. By applying a special voltage on the double-refraction transistors, the double-refraction transistors can become transparent or opaque. Thereby, the electrooptic modulators can select a desired order of the diffraction light ray. The selected diffraction light ray is refracted by the refractor set to the detector for analysis.