The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2000
Filed:
Jan. 09, 1998
Applicant:
Inventors:
Carl E Bohnenkamp, Hopewell Junction, NY (US);
Chester T Dziobkowski, Hopewell Junction, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ; G01N / ;
U.S. Cl.
CPC ...
25044311 ; 250398 ; 250397 ;
Abstract
A charged particle beam apparatus having a cold trap positioned in proximity to components, such as a shaping aperture and a backscattered electrons detector, to which contaminants tend to migrate to adversely affect the functions of these components. As a coolant is passed through the cold trap, the contaminants condense on the cold trap and away from the shaping aperture and the backscattered electrons detector.