The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 04, 2000

Filed:

May. 21, 1998
Applicant:
Inventors:

Katsuaki Sato, Kawasaki, JP;

Yasuyuki Mitsuoka, Chiba, JP;

Kunio Nakajima, Chiba, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250234 ; 250225 ; 250306 ; 354369 ;
Abstract

An optical fiber probe which has a minute opening on the top of a sharpened tip is allowed to get close to a sample, and the probe is moved by a piezo actuator along x- and y-axis directions so that a minute spot beam emanating from the minute opening can scan over the sample. For circular polarization modulation to be incorporated in the process, a beam, before it is incident on the optical fiber probe, is given an optical delay changing at a frequency of p (Hz) by means of a piezo-optical modulator. A minute spot beam emanating from the minute opening passes through the sample to be received after the passage through an analyzer by a light receiving element. The output from the light receiving element is fed to a lock-in amplifier, p- and 2p-components are separated through lock-in rectification, and they are rendered images by a controller.


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