The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 2000

Filed:

Jun. 30, 1998
Applicant:
Inventors:

Na-Young Ryu, Seoul, KR;

Yun-Jin Ko, Seoul, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ; G02B / ;
U.S. Cl.
CPC ...
359291 ; 359224 ;
Abstract

An array of thin film actuated mirrors includes: an active matrix including a substrate, an array of connecting terminals; and an array of actuating structures, each of the actuating structures including an upper electrode functioning as a mirror as well as a common bias electrode, an electrodisplacive member made of a piezoelectric material, a seeding member made of a material having the same crystal structure and growth direction as that of the piezoelectric material constituting the electrodisplacive member, a lower electrode functioning as a signal electrode, an elastic member and a via contact.


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