The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2000
Filed:
Aug. 29, 1997
Applicant:
Inventors:
Reinhard Steiner, Stadtroda, DE;
Dieter Graefe, Jena, DE;
Assignee:
Carl Zeiss Jena GmbH, Jena, DE;
Primary Examiner:
Int. Cl.
CPC ...
G01J / ; G01J / ;
U.S. Cl.
CPC ...
356311 ; 356328 ;
Abstract
A microscope system for detecting the emission distribution of specimens which emit light at least in a punctiform manner, particularly for failure analysis of integrated circuits, comprises an imaging beam path from the specimen in the direction of an at least one-dimensional receiver distribution, wherein at least one element is provided in the imaging beam path for spectral division of the light which is emitted at least in a punctiform manner.