The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2000
Filed:
Apr. 24, 1998
Applicant:
Inventors:
Yukio Otsuka, Aichi-ken, JP;
Motoaki Ozaki, Okazaki, JP;
Assignee:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F / ;
U.S. Cl.
CPC ...
430-5 ; 430-4 ; 430-6 ; 428195 ; 428332 ;
Abstract
The present invention mask 1 has a mask-portion 12. The mask-portion 12 comprises: a bed sheet layer 12c made of paper or resin; and an irradiation-resistant layer 12e made of metal and coated on the irradiation side of the bed sheet layer 12c. The irradiation-resistant layer 12e has durability with respect to the emitted energy such as laser beam than the bed sheet layer 12c.