The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2000
Filed:
Sep. 25, 1996
Norbert Wollenberg, Grosskrotzenburg, DE;
Leybold Materials GmbH, Hanau, DE;
Abstract
A frame (3, 4, 5, . . . 7) at least partially surrounds the target material (19), and serves to mount the target on the cathode backing plate (9), with a separating film or interlayer (20) of soft material disposed between the frame and the cathode backing plate. The frame (3, 4, 5, . . . 7) is provided with a plurality of projections (3a, 3b, . . . 4a, 4b, . . . 7a, 7b . . . ) affixed to the frame members (3, 4, 5, . . . 7) and extending into the target material in order to hold the target material (19) in the spaces (A, B, C) surrounded by the frame members. The target is preferably cast directly into the frame while the frame is fixed to a stainless steel plate, then removed together with the frame after cooling and mounted to the cathode plate.