The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2000
Filed:
Aug. 27, 1998
NEC Corporation, Tokyo, JP;
Abstract
A surface polishing apparatus which presses a work piece 12 into contact with the processing surface of a disk-shaped polishing tool 11 which is rotated and driven, to polish the surface of the work piece 12 as supplying abrasive slurry to the processing surface. The surface polishing apparatus includes an abrasive slurry-supply mechanism 13 which supplies abrasive slurry to the processing surface. The slurry supply mechanism is provided on the backward side of the work piece with respect to the rotation direction of the polishing tool. A dresser 23, which sets the processing surface, is provided on the forward side of the work piece an abrasive slurry-suction mechanism, which sucks and recycles abrasive slurry from the processing surface, is provided on the forward side of the dresser and on the backward side of abrasive slurry-supply mechanism 13.