The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2000
Filed:
Feb. 27, 1998
William Keith Chandler, Woodsboro, MD (US);
Nadir Shah, Elkridge, MD (US);
Waqar Mahmood, Odenton, MD (US);
Andrei Csipkes, Savage, MD (US);
Ciena Corporation, Linthicum, MD (US);
Abstract
A calibration apparatus and method for a polishing machine includes a ferrule surrounding a polishing pad and a plurality of sensors attached to the ferrule. Each of the sensors is directed at a location where optical fibers extending downwardly from a leveling device contact the polishing pad. The sensors are infrared sensors that detect a heat signature generated by friction at the contact point between the optical fibers and the polishing pad as the polishing pad spins and revolves relative to the leveling device. The heat signature that is generated corresponds to the pressure existing between the optical fibers and the polishing pad.