The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2000
Filed:
Sep. 09, 1997
Applicant:
Inventors:
Ivo J Raaijmakers, Phoenix, AZ (US);
Chris W Burkhart, San Jose, CA (US);
David Christensen, San Jose, CA (US);
Michael N Susoeff, San Jose, CA (US);
Assignee:
Novellus Systems, Inc., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
F16K / ; F16K / ;
U.S. Cl.
CPC ...
137537 ; 137511 ; 251 636 ;
Abstract
A pressure-induced shut-off valve for a liquid delivery system with a back pressure regulator having a positive shut-off capability is provided. The pressure-induced shut-off valve may incorporate an integrated purge valve or an integrated cross flow nebulizer/vaporizer. The pressure-induced shut-off valve functions as a variable flow restrictor which automatically adjusts itself to provide a constant back pressure in the liquid line.