The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2000
Filed:
Dec. 29, 1997
Applicant:
Inventor:
John A Weems, San Antonio, TX (US);
Assignee:
VLSI Technology, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
436 75 ; 436 73 ; 436 77 ; 436 79 ; 436 80 ; 436 81 ; 436 82 ; 436 83 ; 436 84 ; 436149 ; 436155 ; 436164 ; 436172 ; 436173 ; 436182 ;
Abstract
A method is used to detect a location of contaminant entry in a processing fluid production and distribution system. A wafer is placed in a clean container. The clean container is connected to a test point within the processing fluid production and distribution system. Processing fluid from the test point of the processing fluid production and distribution system is allowed to flow through the clean container. The wafer is dried. The wafer is then tested for the existence of contaminants.