The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2000
Filed:
Feb. 18, 1998
Industrial Technology Research Institute, Hsinchu Hsien, TW;
Abstract
An apparatus for holding substrate includes a base housing. A plurality of pins are set on the top surface of the base housing. Further, the top surface has a plurality of openings through the top surface. The base housing has a first opening set on the bottom portion of one side of the base housing. Lift means is set in the base housing. A support member having an oblique surface structure is provided in the cylindrical housing and can upwardly pass through an opening formed on top of the cylindrical housing. A plate having a plurality of pins formed thereon is connected to the top of the support member. A substrate holder can be separated from the base housing, and the substrate holder includes a plate. A glass substrate is fixed on the plate by means of a plurality of fixers.