The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2000
Filed:
May. 29, 1998
Otto Albrecht, Atsugi, JP;
Hiroshi Matsuda, Isehara, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
The present invention provides an apparatus for producing a Langmuir-Blodgett film including a water bath having a spread region for spreading a material for forming a single molecular film on a liquid surface, a compression region for compressing the material spread by the spread region to form a single molecular film, and a lamination region for laminating the single molecular film formed by the compression region on a substrate. The apparatus further includes a first flow path for discharging a liquid, which flows from the spread region of the water bath, to the outside of the water bath through the compression region and the lamination region, a first valve for controlling the amount of the liquid discharged through the first flow path, a second flow path for discharging the liquid, which flows from the spread region of the water bath, from the boundary between the compression region and the lamination region through the compression region, and a second valve for controlling the amount of the liquid discharged through the second flow path.