The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2000
Filed:
Mar. 11, 1998
Toshio Ishikawa, Fukiage-machi, Kitaadachi-gun, Saitama, JP;
Other;
Abstract
A side rail for closing each of side walls of a substrate cassette of a rectangular configuration is disclosed which is capable of preventing deformation of the side rail and a dimensional error thereof. The side rail includes a partition plate formed on a surface thereof with ribs for receiving a plurality of substrates therein in a manner to space them from each other. The ribs are arranged so as to define partition grooves therebetween. The side rails also includes a cover member arranged for covering the partition plate and including rib covers for covering the ribs and groove covers arranged between the rib covers for covering the partition grooves. Also, a substrate cassette having the side rails incorporated therein is disclosed.