The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2000
Filed:
Jun. 30, 1997
Applicant:
Inventors:
Martin Gutsche, Poughkeepsie, NY (US);
Dirk Tobben, Fishkill, NY (US);
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438618 ; 438637 ; 438700 ; 430618 ;
Abstract
A method for manufacturing a dual damascene structure includes the use of a sacrificial stud and provides an improved defined edge on the interface between the conductive line openings and the via openings.