The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2000
Filed:
Nov. 12, 1998
Kazutoshi Ejima, Kishima-gun, JP;
Yukihiro Hyobu, Tokyo, JP;
Sumitomo Metal Industries, Ltd., Amagasaki, JP;
Kakizaki Manufacturing Co., Ltd., Tokyo, JP;
Abstract
A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body or the like, and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit said chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material or the like. The gasket is provided between the container body and the lid for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state while maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber.