The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2000
Filed:
May. 01, 1997
Hitoshi Maeda, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A P-type silicon substrate (4) and an N-type diffusion layer region (6) are connected to aluminum electrodes (5 and 7), respectively. Respective sections of the P-type silicon substrate (4) and the N-type diffusion layer region (6) are exposed. The aluminum electrode (5) connected to the P-type silicon substrate (4) and a platinum electrode (1) are connected in common to a cathode of a DC power supply (3a) and the aluminum electrode (7) connected to the N-type diffusion layer region (6) is connected to an anode of the DC power supply (3a). A sample for evaluation is thus provided. Of this sample, the exposed sections of the P-type silicon substrate (4) and the N-type diffusion layer region (6) are dipped into a mixture (2) of hydrofluoric acid and alcohol, and a voltage not lower than a critical voltage is applied thereto by the DC power supply (3a). Thus, an evaluation of a form of a diffusion layer region in a semiconductor device is achieved with excellent reproducibility.