The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2000
Filed:
Dec. 11, 1997
Applicant:
Inventor:
Akira Tago, Tokyo, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01T / ;
U.S. Cl.
CPC ...
25037001 ; 25037008 ; 25037009 ; 438 64 ;
Abstract
A glass substrate holding apparatus for holding a glass substrate formed with a semiconductor thin film element has a first elastic member disposed on the substantially outer peripheral portion of a surface opposite to that surface of the glass substrate on which the semiconductor thin film element is formed, a mounting member disposed so as to hold the first elastic member between itself and the glass substrate, and a second elastic member disposed in a space surrounded by the glass substrate, the first elastic member and the mounting member, and interposed between the glass substrate and the mounting member.