The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2000
Filed:
Jul. 22, 1998
Applicant:
Inventors:
Jean-Paul Guillemet, Toulouse, FR;
Myriam Combes, Paisance Du Touch, FR;
Stephane Astie, Radel, FR;
Emmanuel Scheid, Corronsac, FR;
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
438 49 ; 438 48 ;
Abstract
An electronic device comprises a semiconductor substrate (2) having a cavity (32) extending into the substrate (2), a membrane (8) formed over the semiconductor substrate so as to extend across the cavity (32) in the semiconductor substrate and an active region (14, 30) supported by the membrane (8) and positioned adjacent the cavity (32). The membrane (8) comprises a single dielectric layer formed of an oxy-nitride material.