The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2000
Filed:
Jul. 14, 1997
Adam Q Miller, Felton, CA (US);
Daniel M Dobkin, Sunnyvale, CA (US);
Semiconductor Equipment Group, LLC, Scotts Valley, CA (US);
Abstract
A single body injector for delivering gases to a surface is provided. The injector is comprised of an elongated member with end surfaces and at least one gas delivery surface extending along the length of the member and which includes a number of elongated passages formed therein. Also formed within the member are a number of thin distribution channels which extend between the elongated passages and the gas delivery surface. In another embodiment of the invention a number of metering tubes may be inserted into each elongated passage and are spaced from the walls of the passages and extend between the ends. Gases are conveyed to the elongated passages, through the distribution channels to the gas delivery surface where they are directed to a desired region where they mix, react and form a uniform thin film on the substrate positioned beneath the injector. The gas delivery surface is comprised of rounded side regions and a center recessed region in which instance the thin distribution channels extend between the first elongated passages and the center recessed region of the gas delivery surface. In another embodiment, the injector further contains an elongated passage for receiving an etchant species. The etchant species is conveyed to the gas delivery surface via a distribution channel which extends between the elongated passage and the rounded side regions of the gas delivery surface. The etchant species is distributed along the gas delivery surface where it removes deposited materials along the gas delivery surface and other surfaces within the chamber.