The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2000
Filed:
Apr. 28, 1997
Satoshi Hibino, Hamamatsu, JP;
Yamaha Corporation, , JP;
Abstract
A method of measuring a substrate temperature includes the steps of: forming a first lamination of different metals on a substrate; subjecting the substrate to a heat treatment; measuring a sheet resistance of the substrate after the heat treatment; and estimating a temperature of the substrate during the heat treatment from a correlation between sheet resistances and heat treatment temperatures, the correlation being prepared in advance by subjecting preparatory substrates each having a second lamination having the same structure as the first lamination to heat treatments at a plurality of predetermined heat treatment temperatures and by measuring the sheet resistance of each second lamination layer after the heat treatment. The substrate temperature during heat treatment can be estimated easily without intervening the actual manufacture process by a temperature measuring process.