The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2000
Filed:
Jun. 15, 1998
Applicant:
Inventors:
Assignee:
Universite Laval, Ste-Foy, CA;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ; G02B / ;
U.S. Cl.
CPC ...
359859 ; 359860 ; 359858 ; 359861 ; 359862 ; 359863 ; 359865 ;
Abstract
The present invention is directed to an optical system for measurement of a three dimensional device. The optical system is designed and configured to meet telecentric and f-.theta. requirements. The system employs primary and secondary mirrors operating in conjunction with a tertiary deflector mounted on a pivot. Light from a light source produces a beam which is deflected off the deflector and the secondary and primary reflectors respectively. The beam is then transmitted to the surface of the object to be measured. Deflection of the tertiary deflector on the pivot results in scanning of the light beam across the surface of the object to be measured.