The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2000
Filed:
Mar. 18, 1998
Applicant:
Inventors:
Takehiko Mayama, Utsunomiya, JP;
Hiroaki Kato, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16M / ;
U.S. Cl.
CPC ...
248550 ; 248638 ; 188267 ; 267136 ;
Abstract
An active anti-vibration apparatus includes an anti-vibration mount, which has an actuator and a vibration sensor, for supporting an anti-vibration table, and a control unit for driving the actuator on the basis of output from the vibration sensor. The control unit separates the output from the vibration sensor into high frequency components and low frequency components, applies proper compensation calculation for the respective separated frequency components, and drives the actuator.